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The Nanofabrication & Electron Microscopy Facility is a Small Research Facility (SRF) within the Department of Physics which provides researchers with access to state-of-the-art capabilities for micro- and nano-fabrication and scanning electron microscopy.
The Facility is primarily used by members of the Department and the wider University, but is also available to those outside the University, including academic, commercial and industrial users. We provide researchers and external customers with access to cleanroom facilities for micro- and nanofabrication and scanning electron microscopy.
The core of the facility is a Class 100 and Class 1000 cleanroom suite for sample preparation and lithography, including equipment for resist processing, thin-film deposition, and etching. Additional capabilities include electron beam lithography (EBL) for nanoscale lithographic tasks and focused ion beam (FIB) for small-scale micro- and nano-patterning or materials characterisation, including 3D sub-surface analysis. Scanning electron microscopy facilities are available for high-resolution imaging, metrology, and elemental analysis with energy dispersive X-ray spectroscopy (EDS/EDX).
We provide training for researchers to use our equipment and we welcome enquiries from across the University of Oxford and beyond, including from commercial and industrial users.
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