| Managed by |
Chemistry Research Laboratory |
| Location |
CHEMISTRY RESEARCH LAB, Oxford Science Area |
| Facility |
Surface Analysis Facility (SAF) |
| Availability |
Please contact for information |
| Shareability |
Yes |
| More information |
A 150 W, 13.56 MHz cylindrical plasma chamber designed to produce an isotropic etch. |
Contact information
For more information, contact:
Map
https://maps.ox.ac.uk/bd821e30-d8ba-11eb-a363-059e537832a1/search/projects/23/5da6eb343ac1ce0077dc7980
